Image sensor and method of manufacturing the same

ABSTRACT

An image sensor includes a substrate having a first surface and a second surface opposite to each other, a first floating diffusion region provided in the substrate and being adjacent to the first surface, a through-electrode provided in the substrate and electrically connected to the first floating diffusion region, an insulating structure, a bottom electrode, a photoelectric conversion layer, and a top electrode sequentially stacked on the second surface, a color filter buried in the insulating structure, and a top contact plug penetrating the insulating structure to connect the bottom electrode to the through-electrode.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. non-provisional patent application claims priority under 35U.S.C. § 119 to Korean Patent Application No. 10-2017-0001940, filed onJan. 5, 2017, in the Korean Intellectual Property Office, the disclosureof which is hereby incorporated by reference in its entirety.

BACKGROUND

Embodiments of inventive concepts relate to an image sensor and a methodof manufacturing the same and, more particularly, to an image sensorincluding an organic photoelectric conversion layer and a method ofmanufacturing the same.

An image sensor may convert an optical image into electrical signals.Image sensors may be categorized as a charge coupled device (CCD) imagesensors or complementary metal-oxide-semiconductor (CMOS) image sensors(CIS). The CIS may include a plurality of pixels arrangedtwo-dimensionally. Each of, or at least one of, the pixels may include aphotodiode. The photodiode may be configured to convert incident lightinto an electrical signal.

SUMMARY

Embodiments of inventive concepts may provide an image sensor capable ofimproving an integration density.

Embodiments of inventive concepts may also provide a method ofmanufacturing an image sensor with an improved integration density.

According to an example embodiment, an image sensor may include asubstrate having a first surface and a second surface opposite to thefirst surface, a first floating diffusion region in the substrate, thefirst floating diffusion region adjacent to the first surface, athrough-electrode in the substrate, the through-electrode electricallyconnected to the first floating diffusion region, an insulatingstructure, a bottom electrode, a photoelectric conversion layer, and atop electrode sequentially stacked on the second surface, a color filterburied in the insulating structure, and a top contact plug penetratingthe insulating structure, the top contact plug connecting the bottomelectrode to the through-electrode.

According to an example embodiment, an image sensor may include asubstrate having a first surface and a second surface opposite oneanother the first surface, the substrate including pixel regionsextending in a first direction, first and second deep device isolationpatterns in the substrate, the first and second deep device isolationpatterns including first and second extensions extending in the firstdirection, respectively, the first and second extensions being spacedapart from one another with the pixel regions therebetween,through-electrodes in the substrate, the through-electrodes between thepixel regions when viewed in a plan view, an insulating structure, aphotoelectric conversion layer, and a top electrode sequentiallyprovided on the second surface, bottom electrodes between the insulatingstructure and the photoelectric conversion layer, top contact plugs inthe insulating structure to connect the bottom electrodes to thethrough-electrodes, respectively, and color filters buried in theinsulating structure.

According to an example embodiment, a method of manufacturing an imagesensor may include providing a substrate having a first surface and asecond surface opposite to one another, forming a through-electrode inthe substrate, forming an insulating layer on the second surface,forming a top contact plug penetrating the insulating layer, the topcontact plug connecting to the through-electrode, burying a color filterin the insulating layer, and sequentially forming a bottom electrode, aphotoelectric conversion layer, and a top electrode on the insulatinglayer. The bottom electrode is connected to the top contact plug.

According to an example embodiment, a CMOS image sensor may include asubstrate including a first surface and a second surface opposite thefirst surface, a transfer gate on the first surface of the substrate, amicro lens on the second surface of the substrate, and athrough-electrode in the substrate, the through-electrode extending fromthe first surface of the substrate to the second surface of thesubstrate, the through-electrode including doped poly-silicon.

BRIEF DESCRIPTION OF THE DRAWINGS

Inventive concepts will become more apparent in view of the attacheddrawings and accompanying detailed description.

FIG. 1 is a schematic block view illustrating an image sensor accordingto some embodiments of inventive concepts.

FIGS. 2A to 2C are circuit diagrams for explaining operation of aphotoelectric conversion layer of an image sensor according to someembodiments of inventive concepts.

FIG. 3 is a plan view illustrating an image sensor according to someembodiments of inventive concepts.

FIGS. 4A to 4C are cross-sectional views illustrating image sensorsaccording to some embodiments of inventive concepts.

FIG. 5 is a plan view illustrating an image sensor according to someembodiments of inventive concepts.

FIGS. 6A to 6K are cross-sectional views illustrating a method ofmanufacturing an image sensor according to some embodiments of inventiveconcepts.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Hereinafter, embodiments of inventive concepts will be described indetail with reference to the accompanying drawings. The same referencenumerals or the same reference designators may denote the same elementsthroughout the specification.

FIG. 1 is a schematic block view illustrating an image sensor accordingto some embodiments of inventive concepts.

Referring to FIG. 1, an image sensor may include photoelectricconversion regions PD1 and PD2, color filters 212 and 214, and aphotoelectric conversion layer PD3. The photoelectric conversion regionsPD1 and PD2 may be provided in a substrate 110. The photoelectricconversion layer PD3 may be provided on a surface of the substrate 110,and the color filters 212 and 214 may be provided between thephotoelectric conversion layer PD3 and the substrate 110.

Lights L1, L2, and L3 having first, second, and third wavelengths may beincident on the photoelectric conversion layer PD3. The first wavelengthand the second wavelength may be different from the third wavelength.The first wavelength may be different from the second wavelength. Forexample, the light L1 of the first wavelength may have a red color, thelight L2 of the second wavelength may have a blue color, and the lightL3 of the third wavelength may have a green color.

The photoelectric conversion layer PD3 may generate a thirdphotoelectric signal S3 from the light L3 of the third wavelength. Thephotoelectric conversion layer PD3 may transmit the light L1 of thefirst wavelength and the light L2 of the second wavelength. Thephotoelectric conversion layer PD3 may be shared by a plurality ofpixels Px.

The lights L1 and L2 transmitted through the photoelectric conversionlayer PD3 may be incident on the color filters 212 and 214. The colorfilters 212 and 214 may include first color filters 212 and second colorfilters 214. Each of, or at least one of, the pixels Px may include oneof the first color filter 212 and the second color filter 214. The lightL1 of the first wavelength may transmit through the first color filter212 but may not transmit through the second color filter 214. The lightL2 of the second wavelength may transmit through the second color filter214 but may not transmit through the first color filter 212.

The photoelectric conversion regions PD1 and PD2 may include firstphotoelectric conversion regions PD1 and second photoelectric conversionregions PD2. Each of, or at least one of, the pixels Px may include oneof the first photoelectric conversion region PD1 and the secondphotoelectric conversion region PD2. The pixel Px including the firstcolor filter 212 may include the first photoelectric conversion regionPD1, and the pixel Px including the second color filter 214 may includethe second photoelectric conversion region PD2. For example, the firstphotoelectric conversion region PD1 may be provided under the firstcolor filter 212, and the second photoelectric conversion region PD2 maybe provided under the second color filter 214.

The light L1 of the first wavelength may be incident on the firstphotoelectric conversion region PD1 through the first color filter 212.The first photoelectric conversion region PD1 may generate a firstphotoelectric signal S1 from the light L1 of the first wavelength. Thelight L2 of the second wavelength may be incident on the secondphotoelectric conversion region PD2 through the second color filter 214.The second photoelectric conversion region PD2 may generate a secondphotoelectric signal S2 from the light L2 of the second wavelength.

According to some embodiments of inventive concepts, the photoelectricconversion layer PD3 may be on the photoelectric conversion regions PD1and PD2, and thus an integration density of the image sensor may beimproved.

Hereinafter, operation of the photoelectric conversion layer PD3 will bedescribed with reference to FIGS. 2A and 2B, and operation of thephotoelectric conversion regions PD1 and PD2 will be described withreference to FIG. 2C.

FIGS. 2A and 2B are circuit diagrams for explaining operation of aphotoelectric conversion layer of an image sensor according to someembodiments of inventive concepts.

Referring to FIGS. 2A and 2B, each of, or at least one of, the pixelsmay include a first source follower transistor S_(X), a first resettransistor R_(X), and a first selection transistor A_(X). The firstsource follower transistor S_(X), the first reset transistor R_(X), andthe first selection transistor A_(X) may include a first source followergate SG, a first reset gate RG, and a first selection gate AG,respectively.

A first floating diffusion region FD1 may function as a source of thefirst reset transistor R_(X). The first floating diffusion region FD1may be electrically connected to the first source follower gate SG ofthe first source follower transistor S_(X). The first source followertransistor S_(X) may be connected to the first selection transistorA_(X).

The photoelectric conversion layer PD3 of each pixel may operate asfollows.

In a state in which light is blocked, a power voltage V_(DD) may beapplied to a drain of the first reset transistor R_(X) and a drain ofthe first source follower transistor S_(X) and the first resettransistor R_(X) may be turned on. Thus, charges remaining in the firstfloating diffusion region FD1 may be discharged. The first resettransistor R_(X) may be turned off after discharging the charges in thefirst floating diffusion region FD1.

When light is incident from the outside on the photoelectric conversionlayer PD3, photocharges (e.g., electron-hole pairs) may be generated inthe photoelectric conversion layer PD3. When a voltage V_(TOP) isapplied to the photoelectric conversion layer PD3, the generatedphotocharges may be transferred to and accumulated in the first floatingdiffusion region FD1. FIG. 2A illustrates a circuit diagram of a case inwhich the photocharges transferred from the photoelectric conversionlayer PD3 to the first floating diffusion region FD1 are electrons, andFIG. 2B illustrates a circuit diagram of a case in which thephotocharges transferred from the photoelectric conversion layer PD3 tothe first floating diffusion region FD1 are holes. A gate bias of thefirst source follower transistor S_(X) may be varied in proportion tothe amount of the charges accumulated in the first floating diffusionregion FD1. This may cause a variation in source potential of the firstsource follower transistor S_(X). At this time, when the first selectiontransistor A_(X) is turned on, a signal generated by the light incidenton the photoelectric conversion layer PD3 may be outputted to an outputline Vout.

One pixel including three transistors R_(X), S_(X), and A_(X) isillustrated as an example in FIGS. 2A and 2B. However, embodiments ofinventive concepts are not limited thereto. In some embodiments, thefirst reset transistor R_(X), the first source follower transistorS_(X), and/or the first selection transistor A_(X) may be shared bypixels adjacent to one another. Thus, the integration density of theimage sensor may be improved.

FIG. 2C is a circuit diagram for explaining operation of a photoelectricconversion region of an image sensor according to some embodiments ofinventive concepts.

Referring to FIG. 2C, each of, or at least one of, the pixels mayfurther include a transfer transistor T_(X)′, a second source followertransistor S_(X)′, a second reset transistor R_(X)′, and a secondselection transistor A_(X)′. The transfer transistor T_(X)′, the secondsource follower transistor S_(X)′, the second reset transistor R_(X)′,and the second selection transistor A_(X)′ may include a transfer gateTG′, a second source follower gate SG′, a second reset gate RG′, and asecond selection gate AG′, respectively.

A second floating diffusion region FD2 may function as a drain of thetransfer transistor T_(X)′. The second floating diffusion region FD2 mayalso function as a source of the second reset transistor R_(X)′. Thesecond floating diffusion region FD2 may be electrically connected tothe second source follower gate SG′ of the second source followertransistor S_(X)′. The second source follower transistor S_(X)′ may beconnected to the second selection transistor A_(X)′.

When light is incident from the outside on the photoelectric conversionregion PD1/PD2, electron-hole pairs may be generated in thephotoelectric conversion region PD1/PD2. The generated holes may bemoved into and accumulated in a P-type dopant region of thephotoelectric conversion region PD1/PD2, and the generated electrons maybe moved into and accumulated in an N-type dopant region of thephotoelectric conversion region PD1/PD2. When the transfer transistorT_(X)′ is turned on, the generated charges (e.g., holes or electrons)may be transferred into and accumulated in the second floating diffusionregion FD2.

Operations and functions of the second source follower transistorS_(X)′, the second reset transistor R_(X)′, and the second selectiontransistor A_(X)′ may be substantially the same as those of the firstsource follower transistor S_(X), the first reset transistor R_(X), andthe first selection transistor A_(X), described with reference to FIGS.2A and 2B.

In some embodiments, the second source follower transistor S_(X)′, thesecond reset transistor R_(X)′, and the second selection transistorA_(X)′ may be provided separately from and operated independently fromthe first source follower transistor S_(X), the first reset transistorR_(X), and the first selection transistor A_(X).

In some embodiments, the photoelectric conversion region PD1/PD2 and thephotoelectric conversion layer may share the first source followertransistor S_(X), the first reset transistor R_(X), and/or the firstselection transistor A_(X), described with reference to FIGS. 2A and 2B.Accordingly, the second source follower transistor S_(X)′, the secondreset transistor R_(X)′, and/or the second selection transistor A_(X)′may not be provided.

FIG. 3 is a plan view illustrating an image sensor according to someembodiments of inventive concepts. FIGS. 4A to 4C are cross-sectionalviews illustrating image sensors according to some embodiments ofinventive concepts. FIGS. 4A to 4C are cross-sectional viewscorresponding to a line III-III′ of FIG. 3.

Referring to FIGS. 3 and 4A to 4C, a substrate 110 may be provided. Thesubstrate 110 may have a first surface 110 a and a second surface 110 bopposite to the first surface. The first surface 110 a of the substrate110 may be or may include a front surface, and the second surface 110 bof the substrate 110 may be or may include a back surface. For example,the substrate 110 may include a bulk silicon substrate, asilicon-on-insulator (SOI) substrate, and/or a semiconductor epitaxiallayer. The substrate 110 may have a first conductivity type (e.g., aP-type).

The substrate 110 may include a plurality of pixel regions PXR arrangedtwo-dimensionally. The pixel regions PXR may include a plurality of rowsparallel to a first direction D1. For example, the pixel regions PXR maybe arranged in the first direction D1 in each of the rows. The pluralityof rows consisting of the pixel regions PXR may be arranged in a seconddirection D2 intersecting the first direction D1.

First device isolation patterns DI may be provided in the substrate 110.Each of, or at least one of, the first device isolation patterns DI maybe or may include a deep device isolation pattern that extends from thefirst surface 110 a to the second surface 110 b of the substrate 110.

Each of, or at least one of, the first device isolation patterns DI mayinclude an extension DI_E extending in the first direction D1. Theextensions DI_E may be between the rows of the pixel regions PXR. Onerow consisting of the pixel regions PXR may be between the extensionsDI_E of a pair of the first device isolation patterns DI adjacent to oneanother. For example, the extensions DI_E and the rows of the pixelregions PXR may be alternately arranged in the second direction D2.

Each of, or at least one of, the first device isolation patterns DI mayfurther include protrusions DI_P that extend from the extension DI_E inparallel to the second direction D2. The protrusions DI_P may extendbetween the pixel regions PXR included in each of adjacent rows.

In some embodiments, the first device isolation patterns DI may includean insulating material having a lower refractive index than thesubstrate 110 (e.g., silicon). For example, the first device isolationpatterns DI may include at least one of silicon oxide, silicon nitride,undoped poly-silicon, or air.

In some embodiments, the first device isolation patterns DI may includea conductive layer (not shown) and an insulating layer (not shown)between the conductive layer and the substrate 110. For example, theconductive layer may include poly-silicon doped with dopants and/or ametal. For example, the insulating layer may include silicon oxide,silicon nitride, and/or silicon oxynitride.

A second device isolation pattern SI may be provided in the substrate110. The second device isolation pattern SI may be or may include ashallow device isolation pattern that is formed from the first surface110 a in the substrate 110. A depth of the second device isolationpattern SI may be smaller than a depth of the first device isolationpattern DI.

The second device isolation pattern SI may define an active region ineach of the pixel regions PXR. The active region may be or may include aregion for transistors on the first surface 110 a of the substrate 110.For example, the transistors on the first surface 110 a may include thetransistors R_(X), S_(X), A_(X), T_(X)′, R_(X)′, S_(X)′, and/or A_(X)′described with reference to FIGS. 2A to 2C. For example, the seconddevice isolation pattern SI may include silicon oxide, silicon nitride,and/or silicon oxynitride.

Through-electrodes 120 may be provided in the substrate 110. Thethrough-electrodes 120 may include a conductive material. In someembodiments, the through-electrodes 120 may include poly-silicon dopedwith N-type dopants or P-type dopants. In some embodiments, aconcentration of the N-type or P-type dopants included in thethrough-electrodes 120 may be greater than 10¹⁹/cm³. In someembodiments, the N-type dopants may be or may include arsenic orphosphorus. In some embodiments, the P-type dopants may be or mayinclude boron. However, inventive concepts are not limited thereto.

The through-electrodes 120 may be between the pixel regions PXR whenviewed in a plan view. For example, the through-electrodes 120 may bebetween the pixel regions PXR in each of the rows consisting of thepixel regions PXR. For example, each of, or at least one of, thethrough-electrodes 120 may be between the protrusions DI_P that face oneanother and are respectively included in a pair of the first deviceisolation patterns DI adjacent to one another. The through-electrodes120 and the pixel regions PXR may be alternately arranged in the firstdirection D1 in each of the plurality of rows.

As illustrated in FIG. 3, a width 120_W1 of each of, or at least one of,the through-electrodes 120 in the first direction D1 may be greater thana width DI_W1 of each of the protrusions DI_P of the first deviceisolation patterns DI in the first direction D1 when viewed in a planview. In addition, a width 120_W2 of each of, or at least one of, thethrough-electrodes 120 in the second direction D2 may be greater than awidth DI_W2 of the extension DI_E of each of the first device isolationpatterns DI in the second direction D2 when viewed in a plan view.

As illustrated in FIG. 4A, a width 120_W of each of, or at least one of,the through-electrodes 120 may decrease as a vertical distance from thesecond surface 110 b of the substrate 110 decreases, when viewed in across-sectional view.

Each of, or at least one of, the through-electrodes 120 may extend in athird direction D3 substantially perpendicular to the first surface 110a of the substrate 110. One end 120 b of each of, or at least one of,the through-electrodes 120 may be substantially coplanar with the secondsurface 110 b of the substrate 110.

According to some embodiments, as illustrated in FIGS. 4A and 4B,another end 120 a of each of, or at least one of, the through-electrodes120 may be recessed from the first surface 110 a toward the secondsurface 110 b of the substrate 110. For example, the another end 120 aof each of, or at least one of, the through-electrodes 120 may be at alevel (or a height) between the first surface 110 a and the secondsurface 110 b of the substrate 110. For example, a vertical distancebetween the one end 120 b and the another end 120 a of each of, or atleast one of, the through-electrodes 120 may be smaller than a verticaldistance between the second surface 110 b and the first surface 110 a ofthe substrate 110. In some embodiments, the another end 120 a of eachof, or at least one of, the through-electrodes 120 may be atsubstantially the same level as a bottom surface SI_a of the seconddevice isolation pattern SI, as illustrated in FIG. 4A. In someembodiments, the another end 120 a of each of, or at least one of, thethrough-electrodes 120 may be at a level between the bottom surface SI_aof the second device isolation pattern SI and the second surface 110 bof the substrate 110, as illustrated in FIG. 4B. In some embodiments,the another end 120 a of each of, or at least one of, thethrough-electrodes 120 may be at a level between the bottom surface SI_aof the second device isolation pattern SI and the first surface 110 a ofthe substrate 110, unlike FIGS. 4A and 4B.

In these embodiments, a filling insulation pattern 130 may be providedon the another end 120 a of each of, or at least one of, thethrough-electrodes 120. One surface of the filling insulation pattern130 may be substantially coplanar with the first surface 110 a of thesubstrate 110. For example, the filling insulation pattern 130 mayinclude at least one of silicon oxide, silicon nitride, or siliconoxynitride.

In some embodiments, the another end 120 a of each of, or at least oneof, the through-electrodes 120 may be substantially coplanar with thefirst surface 110 a of the substrate 110, as illustrated in FIG. 4C. Inthese embodiments, the filling insulation pattern 130 of FIGS. 4A and 4Bmay not be provided.

A through insulating pattern 122 may be provided between the substrate110 and a sidewall of each of, or at least one of, thethrough-electrodes 120. For example, the through insulating pattern 122may include at least one of silicon oxide, silicon nitride, or siliconoxynitride.

Each of, or at least one of, the through-electrodes 120 and the throughinsulating pattern 122 on the sidewall thereof may include athrough-structure 125. In some embodiments, the through-structures 125may be spaced apart from the first device isolation patterns DI, asillustrated in FIG. 3.

FIG. 5 is a plan view illustrating an image sensor according to someembodiments of inventive concepts. In some embodiments, each of, or atleast one of, the through-structures 125 may be in contact with theprotrusions DI_P which face one another and are respectively included ina pair of the adjacent first device isolation patterns DI, asillustrated in FIG. 5.

Referring again to FIGS. 3 and 4A to 4C, photoelectric conversionregions PD1 and PD2 may be provided in the substrate 110. In moredetail, the photoelectric conversion region PD1 or PD2 may be in eachof, or at least one of, the pixel regions PXR of the substrate 110. Thephotoelectric conversion regions PD1 and PD2 may include firstphotoelectric conversion regions PD1 and second photoelectric conversionregions PD2. The first photoelectric conversion regions PD1 maycorrespond to the first photoelectric conversion regions PD1 describedwith reference to FIG. 1, and the second photoelectric conversionregions PD2 may correspond to the second photoelectric conversionregions PD2 described with reference to FIG. 1. The first and secondphotoelectric conversion regions PD1 and PD2 may be arrangedtwo-dimensionally and may be alternately arranged in the first directionD1 and the second direction D2 when viewed in a plan view.

The photoelectric conversion regions PD1 and PD2 may be doped withdopants of a second conductivity type (e.g., an N-type) different fromthe first conductivity type (e.g., the P-type). Thus, the photoelectricconversion regions PD1 and PD2 may have the second conductivity type.For example, each of, or at least one of, the photoelectric conversionregions PD1 and PD2 may have a potential gradient between the firstsurface 110 a and the second surface 110 b of the substrate 110. Adopant concentration of a portion, adjacent to the first surface 110 a,of each of, or at least one of, the photoelectric conversion regions PD1and PD2 may be different from a dopant concentration of another portion,adjacent to the second surface 110 b, of each of, or at least one of,the photoelectric conversion regions PD1 and PD2. For example, each of,or at least one of, the photoelectric conversion regions PD1 and PD2 mayinclude a plurality of stacked dopant regions.

Well dopant regions WR may be provided in the substrate 110. In detail,the well dopant regions WR may be in the pixel regions PXR of thesubstrate 110, respectively. Each of, or at least one of, the welldopant regions WR may be adjacent to the first surface 110 a of thesubstrate 110. Thus, the well dopant region WR may be between thephotoelectric conversion region PD1 or PD2 and the first surface 110 aof the substrate 110 in each of, or at least one of, the pixel regionsPXR. For example, the photoelectric conversion region PD1 or PD2 may bebetween the well dopant region WR and the second surface 110 b of thesubstrate 110.

The well dopant regions WR may be doped with dopants of the firstconductivity type (e.g., the P-type). Thus, the well dopant regions WRmay have the first conductivity type.

First floating diffusion regions FD1 and second floating diffusionregions FD2 may be provided in the substrate 110. In detail, each of, orat least one of, the first floating diffusion regions FD1 and each of,or at least one of, the second floating diffusion regions FD2 may beprovided in each of, or at least one of, the pixel regions PXR of thesubstrate 110. Each of, or at least one of, the first floating diffusionregions FD1 may correspond to the first floating diffusion region FD1described with reference to FIGS. 2A and 2B, and each of, or at leastone of, the second floating diffusion regions FD2 may correspond to thesecond floating diffusion region FD2 described with reference to FIG.2C.

In each of, or at least one of, the pixel regions PXR, the firstfloating diffusion region FD1 and the second floating diffusion regionFD2 may be in the well dopant region WR and may be adjacent to the firstsurface 110 a of the substrate 110. As illustrated in FIGS. 3 and 5, thefirst floating diffusion region FD1 and the second floating diffusionregion FD2 may be arranged in a line in the first direction D1. However,embodiments of inventive concepts are not limited thereto. In someembodiments, planar arrangement of the first floating diffusion regionFD1 and the second floating diffusion region FD2 may be variouslychanged. In each of, or at least one of, the pixel regions PXR, thefirst floating diffusion region FD1 may be spaced apart from the secondfloating diffusion region FD2, and the second device isolation patternSI may extend between the first and second floating diffusion regionsFD1 and FD2. In each of, or at least one of, the pixel regions PXR, thefirst floating diffusion region FD1 and the second floating diffusionregion FD2 may be electrically isolated from one another by a potentialbarrier.

The first floating diffusion regions FD1 and the second floatingdiffusion regions FD2 may be doped with dopants of the secondconductivity type (e.g., the N-type). Thus, the first and secondfloating diffusion regions FD1 and FD2 may have the second conductivitytype.

Transfer gates TG′ may be on the first surface 110 a of the substrate110. The transfer gates TG′ may be to correspond to the pixel regionsPXR, respectively. A corresponding one of the second floating diffusionregions FD2 may be at a side of each of, or at least one of, thetransfer gates TG′.

Each of, or at least one of, the transfer gates TG′ may include a lowerportion inserted in the substrate 110 and an upper portion protrudingfrom the first surface 110 a of the substrate 110. The upper portion isconnected to the lower portion. Each of, or at least one of, thetransfer gates TG′ may correspond to the transfer gate TG′ describedwith reference to FIG. 2C.

A gate insulating pattern GI may be provided between each of, or atleast one of, the transfer gates TG′ and the substrate 110. A gatespacer GS may be provided on a sidewall of the upper portion of each of,or at least one of, the transfer gates TG′. For example, each of, or atleast one of, the gate insulating pattern GI and the gate spacer GS mayinclude at least one of silicon oxide, silicon nitride, or siliconoxynitride.

A first source follower gate (not shown), a first reset gate (notshown), a first selection gate (not shown), a second source followergate (not shown), a second reset gate (not shown), and/or a secondselection gate (not shown) may be provided on the first surface 110 a ofthe substrate 110. The gates may be configured to perform substantiallythe same functions and/or operations as described with reference toFIGS. 2A to 2C.

A first interlayer insulating layer 140 may be provided on the firstsurface 110 a of the substrate 110. The first interlayer insulatinglayer 140 may cover the gates (e.g., the transfer gates TG′) provided onthe first surface 110 a of the substrate 110. For example, the firstinterlayer insulating layer 140 may include at least one of siliconoxide, silicon nitride, or silicon oxynitride.

First bottom contact plugs BCP1 may penetrate the first interlayerinsulating layer 140 so as to be connected to the through-electrodes120, respectively. A width BCP1_W of each of, or at least one of, thefirst bottom contact plugs BCP1 may be smaller than the width 120_W ofeach of, or at least one of, the through-electrodes 120 when viewed in across-sectional view. The width BCP1_W of each of, or at least one of,the first bottom contact plugs BCP1 may taper. For example, the widthBCP1_W of each of, or at least one of, the first bottom contact plugsBCP1 progressively decrease as being adjacent to the through-electrode120 connected thereto when viewed in a cross-sectional view.

Second bottom contact plugs BCP2 may penetrate the first interlayerinsulating layer 140 so as to be connected to the first floatingdiffusion regions FD1, respectively, and third bottom contact plugs BCP3may penetrate the first interlayer insulating layer 140 so as to beconnected to the second floating diffusion regions FD2, respectively. Awidth of each of, or at least one of, the second bottom contact plugsBCP2 and a width of each of, or at least one of, the third bottomcontact plugs BCP3 may taper. For example, the width of each of, or atleast one of, the second bottom contact plugs BCP2 and the width of theeach of, or at least one of, the third bottom contact plugs BCP3 mayprogressively decrease as being adjacent to the first surface 110 a ofthe substrate 110. Lengths of the second bottom contact plugs BCP2 inthe third direction D3 may be substantially equal to lengths of thethird bottom contact plugs BCP3 in the third direction D3.

The first to third bottom contact plugs BCP1, BCP2, and BCP3 may includea conductive material. For example, the first to third bottom contactplugs BCP1, BCP2, and BCP3 may include a metal (e.g., tungsten).

In the case in which the filling insulation patterns 130 are providedlike FIGS. 4A and 4B, the first bottom contact plugs BCP1 may furtherpenetrate the filling insulation patterns 130, respectively.Accordingly, lengths of the first bottom contact plugs BCP1 in the thirddirection D3 may be greater than the lengths of the second bottomcontact plugs BCP2 in the third direction D3 and the lengths of thethird bottom contact plugs BCP3 in the third direction D3.

In the case in which the filling insulation patterns 130 are notprovided like FIG. 4C, the lengths of the first bottom contact plugsBCP1 in the third direction D3 may be substantially equal to the lengthsof the second bottom contact plugs BCP2 in the third direction D3 andthe lengths of the third bottom contact plugs BCP3 in the thirddirection D3.

Interconnection lines CL1 and CL2 may be provided on the firstinterlayer insulating layer 140. The interconnection lines CL1 and CL2may include first interconnection lines CL1 and second interconnectionlines CL2. Each of, or at least one of, the first interconnection linesCL1 may connect a corresponding one of the first bottom contact plugsBCP1 to a corresponding one of the second bottom contact plugs BCP2, andeach of, or at least one of, the second interconnection lines CL2 may beconnected to a corresponding one of the third bottom contact plugs BCP3.Each of, or at least one of, the through-electrodes 120 may beelectrically connected to the first floating diffusion region FD1through the first bottom contact plug BCP1, the first interconnectionline CL1, and the second bottom contact plug BCP2. The interconnectionlines CL1 and CL2 may include a conductive material. For example, theinterconnection lines CL1 and CL2 may include a metal (e.g., tungsten).

A second interlayer insulating layer 142 may be provided on the firstinterlayer insulating layer 140. The second interlayer insulating layer142 may cover the interconnection lines CL1 and CL2. For example, thesecond interlayer insulating layer 142 may include at least one ofsilicon oxide, silicon nitride, or silicon oxynitride.

A buffer layer BL may be provided on the second surface 110 b of thesubstrate 110. The buffer layer BL may inhibit charges (e.g., electronsor holes) generated by defects of the second surface 110 b of thesubstrate 110 from moving to the photoelectric conversion regions PD1and PD2. The buffer layer BL may include a metal oxide. For example, thebuffer layer BL may include aluminum oxide and/or hafnium oxide.

An insulating structure 220 may be provided on the buffer layer BL.Color filters 212 and 214 may be buried in the insulating structure 220.For example, the insulating structure 220 may include at least one ofsilicon oxide, silicon nitride, or silicon oxynitride.

In more detail, the insulating structure 220 may include a firstinsulating pattern 222 having recess regions 222 r. The recess regions222 r may correspond to the pixel regions PXR of the substrate 110,respectively, when viewed in a plan view. The buffer layer BL may beexposed by the recess regions 222 r.

The color filters 212 and 214 may include first color filters 212 andsecond color filters 214. The first color filters 212 may correspond tothe first color filters 212 described with reference to FIG. 1, and thesecond color filters 214 may correspond to the second color filters 214described with reference to FIG. 1. One of the first color filter 212and the second color filter 214 may be in each of, or at least one of,the recess regions 222 r. The first color filters 212 may correspond tothe first photoelectric conversion regions PD1 in a plan view, and thesecond color filters 214 may correspond to the second photoelectricconversion regions PD2 in a plan view.

As described with reference to FIGS. 1 and 2C, the first color filter212 may transmit the light L1 of the first wavelength. The firstphotoelectric conversion region PD1 may generate charges (e.g.,electron-hole pairs) from the light L1 of the first wavelength. When thetransfer transistor T_(X)′ is turned on, the generated charges (e.g.,holes or electrons) may be transferred into and accumulated in thesecond floating diffusion region FD2. The second color filter 214 maytransmit the light L2 of the second wavelength. The second photoelectricconversion region PD2 may generate charges (e.g., electron-hole pairs)from the light L2 of the second wavelength. When the transfer transistorT_(X)′ is turned on, the generated charges (e.g., holes or electrons)may be transferred into and accumulated in the second floating diffusionregion FD2.

The insulating structure 220 may further include second insulatingpatterns 224 provided on the color filters 212 and 214. In someembodiments, the second insulating patterns 224 may be respectivelyprovided in the recess regions 222 r and may be spaced apart from oneanother, as illustrated in FIGS. 4A to 4C. In some embodiments, thesecond insulating patterns 224 may extend onto the first insulatingpattern 222 so as to be connected to one another.

Top contact plugs TCP may penetrate the first insulating pattern 222 ofthe insulating structure 220 and the buffer layer BL so as to beconnected to the through-electrodes 120, respectively. A width TCP_W ofeach of, or at least one of, the top contact plugs TCP may be smallerthan the width 120_W of each of, or at least one of, thethrough-electrodes 120 when viewed in a cross-sectional view. The widthTCP_W of each of, or at least one of, the top contact plugs TCP maytaper. For example, taper. For example, the width TCP_W of each of, orat least one of, the top contact plugs TCP may progressively decrease asbeing adjacent to the through-electrode 120 connected thereto (oradjacent to the second surface 110 b of the substrate 110). The topcontact plugs TCP may include a conductive material. For example, thetop contact plugs TCP may include a metal (e.g., tungsten).

Bottom electrodes 230 may be provided on the insulating structure 220.The bottom electrodes 230 may correspond to the pixel regions PXR of thesubstrate 110, respectively, when viewed in a plan view. The bottomelectrodes 230 may be spaced apart from one another. Each of, or atleast one of, the bottom electrodes 230 may be connected to acorresponding one of the top contact plugs TCP. Thus, each of, or atleast one of, the bottom electrodes 230 may be electrically connected tothe first floating diffusion region FD1 through the top contact plugTCP, the through-electrode 120, the first bottom contact plug BCP1, thefirst interconnection line CL1, and the second bottom contact plug BCP2.The bottom electrodes 230 may include a transparent conductive material.For example, the bottom electrodes 230 may include at least one ofindium-tin oxide (ITO), indium-zinc oxide (IZO), zinc oxide (ZnO), or anorganic transparent conductive material.

A third insulating pattern 226 may be provided to fill a gap between thebottom electrodes 230. A top surface of the third insulating pattern 226may be substantially coplanar with top surfaces of the bottom electrodes230. For example, the third insulating pattern 226 may include at leastone of silicon oxide, silicon nitride, or silicon oxynitride.

A photoelectric conversion layer PD3 may be provided on the bottomelectrodes 230. In some embodiments, the photoelectric conversion layerPD3 may include an organic photoelectric conversion layer. In theseembodiments, the photoelectric conversion layer PD3 may include a P-typeorganic semiconductor material and an N-type organic semiconductormaterial, which may form a PN junction. In some embodiments, thephotoelectric conversion layer PD3 may include quantum dots or achalcogenide.

The photoelectric conversion layer PD3 may correspond to thephotoelectric conversion layer PD3 described with reference to FIGS. 1,2A, and 2B. As described with reference to FIG. 1, the photoelectricconversion layer PD3 may absorb the light L3 of the third wavelength togenerate charges (e.g., electron-hole pairs) from the light L3 of thethird wavelength. An additional color filter may not exist on thephotoelectric conversion layer PD3. The charges generated in thephotoelectric conversion layer PD3 may be transferred into andaccumulated in the first floating diffusion region FD1 through thebottom electrode 230, the top contact plug TCP, the through-electrode120, the first bottom contact plug BCP1, the first interconnection lineCL1, and the second bottom contact plug BCP2.

A top electrode 240 may be provided on the photoelectric conversionlayer PD3. The top electrode 240 may include a transparent conductivematerial. For example, the top electrode 240 may include at least one ofindium-tin oxide (ITO), indium-zinc oxide (IZO), zinc oxide (ZnO), or anorganic transparent conductive material.

A capping layer 250 may be provided on the top electrode 240. Thecapping layer 250 may include an insulating material. For example, thecapping layer 250 may include at least one of aluminum oxide, siliconoxide, silicon nitride, or silicon oxynitride.

Micro lenses 260 may be provided on the capping layer 250. The microlenses 260 may be to correspond to the pixel regions PXR, respectively,when viewed in a plan view. Each of, or at least one of, the microlenses 260 may have a convex shape and may have a specific radius ofcurvature.

According to some embodiments of inventive concepts, the substrate 110may include the two-dimensionally arranged pixel regions PXR. Thephotoelectric conversion regions PD1 and PD2 may be provided in thepixel regions PXR, respectively. The photoelectric conversion layer PD3may be provided on the substrate 110 and may selectively absorb thelight of the third wavelength to generate the third photoelectricsignal. The pixels of the image sensor may share the photoelectricconversion layer PD3. The color filters 212 and 214 may be between thesubstrate 110 and the photoelectric conversion layer PD3. The firstcolor filters 212 selectively transmitting the light of the firstwavelength may overlap with the first photoelectric conversion regionsPD1, respectively, when viewed in a plan view. The second color filters214 selectively transmitting the light of the second wavelength mayoverlap with the second photoelectric conversion regions PD2,respectively, when viewed in a plan view. Thus, the first photoelectricconversion regions PD1 may absorb the light of the first wavelength togenerate the first photoelectric signals, and the second photoelectricconversion regions PD2 may absorb the light of the second wavelength togenerate the second photoelectric signals. As a result, each of, or atleast one of, the pixels of the image sensor may absorb two kinds oflights to generate two kinds of photoelectric signals.

In addition, according to some embodiments of inventive concepts, thecolor filters 212 and 214 may be buried in the insulating structure 220,and the top contact plugs TCP may be provided in the insulatingstructure 220 to connect the bottom electrodes 230 to thethrough-electrodes 120. Each of, or at least one of, the top contactplugs TCP may have a relatively small width. For example, the widthTCP_W of each of, or at least one of, the top contact plugs TCP may besmaller than the width 120_W of each of, or at least one of, thethrough-electrodes 120. Thus, it is possible to secure a sufficientspace, in which the color filters 212 and 214 are buried, in theinsulating structure 220.

As a result, according to some embodiments of inventive concepts, theintegration density of the image sensor may be improved.

FIGS. 6A to 6K are cross-sectional views illustrating a method ofmanufacturing an image sensor according to some embodiments of inventiveconcepts. FIGS. 6A to 6K are cross-sectional views corresponding to theline III-III′ of FIG. 3. Hereinafter, the same elements as describedwith reference to FIGS. 3 and 4A to 4C will be indicated by the samereference numerals or the same reference designators, and thedescriptions thereto will be omitted or mentioned briefly for thepurpose of ease and convenience in explanation.

Referring to FIGS. 3 and 6A, a substrate 110 having a first conductivitytype may be provided. In some embodiments, as illustrated in FIG. 6A,providing the substrate 110 having the first conductivity type mayinclude performing an epitaxial growth process on a sacrificialsubstrate 100 while supplying dopants of the first conductivity typein-situ. In some embodiments, unlike FIG. 6B, providing the substrate110 having the first conductivity type (e.g., a P-type) may includedoping a bulk silicon substrate with dopants of the first conductivitytype.

The substrate 110 may include pixel regions PXR. The pixel regions PXRmay be two-dimensionally arranged. For example, the pixel regions PXRmay be arranged in a first direction D1 and a second direction D2intersecting the first direction D1.

The substrate 110 may have a first surface 110 a and a second surface110 b opposite to the first surface. The second surface 110 b may be incontact with the sacrificial substrate 100.

Photoelectric conversion regions PD1 and PD2 and well dopant regions WRmay be formed in the substrate 110. The formation of the photoelectricconversion regions PD1 and PD2 may include forming a mask (not shown)having openings corresponding to the pixel regions PXR on the firstsurface 110 a of the substrate 110, and injecting dopants of a secondconductivity type (e.g., an N-type) different from the firstconductivity type into the substrate 110 by using the mask. Theinjecting of dopants may include ion implantation with a beam-lineprocess. The formation of the well dopant regions WR may includeinjecting dopants of the first conductivity type into the substrate 110by using the mask. The mask may be removed after the formation of thephotoelectric conversion regions PD1 and PD2 and the well dopant regionsWR. The photoelectric conversion regions PD1 and PD2 may be spaced apartfrom the first surface 110 a of the substrate 110 with the well dopantregions WR interposed therebetween, and the well dopant regions WR maybe adjacent to the first surface 110 a of the substrate 100.

Referring to FIGS. 3 and 6B, a shallow trench ST may be formed in thesubstrate 110 from the first surface 110 a. The shallow trench ST maydefine an active region in each of, or at least one of, the pixelregions PXR. A depth of the shallow trench ST may be smaller than depthsof the well dopant regions WR.

A second device isolation pattern SI may be formed to fill the shallowtrench ST. The formation of the second device isolation pattern SI mayinclude forming an insulating layer (not shown) filling the shallowtrench ST on the first surface 110 a of the substrate 110 and performinga planarization process on the insulating layer until the first surface110 a is exposed. The insulating layer may be formed with a high-densityplasma (HDP) deposition process and/or a spin-on glass (SOG) depositionprocess, however, inventive concepts are not limited thereto. Theplanarization process may include a CMP process; however, inventiveconcepts are not limited thereto.

Referring to FIGS. 3 and 6C, through-holes H may be formed between thepixel regions PXR. For example, the through-holes H may be formedbetween the pixel regions PXR arranged in a first direction, when viewedin a plan view. The through-holes H may overlap with the second deviceisolation pattern SI when viewed in a plan view. Each of, or at leastone of, the through-holes H may penetrate the second device isolationpattern SI and the substrate 110, and an upper portion of thesacrificial substrate 100 under the through-holes H may be recessed. Theformation of the through-holes H may include forming a mask (not shown)on the first surface 110 a of the substrate 110 and performing ananisotropic etching process using the mask as an etch mask. In someexample embodiments, the formation of the through-holes may include aBosch process.

Referring to FIGS. 3 and 6D, a through insulating pattern 122 and athrough-electrode 120 may be formed to fill at least a portion of eachof, or at least one of, the through-holes H. The through insulatingpattern 122 and the through-electrode 120 in each of, or at least oneof, the through-holes H may be defined as a through-structure 125. Forexample, the through insulating pattern 122 may include at least one ofsilicon oxide, silicon nitride, or silicon oxynitride. Thethrough-electrodes 120 may include poly-silicon doped with N-type orP-type dopants. The through insulating pattern 122 and/or thethrough-electrodes 120 may be formed with a chemical vapor deposition(CVD) process; however, inventive concepts are not limited thereto.

The formation of the through insulating patterns 122 and thethrough-electrodes 120 may include forming a through insulating layer(not shown) conformally covering inner surfaces of the through-holes H,forming preliminary through-electrodes (not shown) partially or fullyfilling the through-holes H, and performing an etch-back process (or aplanarization process).

In some embodiments, the through-structure 125 may be formed topartially fill the through-hole H, as illustrated in FIG. 6D. In theseembodiments, a filling insulation pattern 130 may be formed to fill aremaining portion of the through-hole H on each of, or at least one of,the through-structures 125. The formation of the filling insulationpatterns 130 may include forming a filling insulation layer (not shown)filling the through-holes H and performing a planarization process onthe filling insulation layer until the first surface 110 a of thesubstrate 110 is exposed.

In some embodiments, the through-structures 125 may be formed tocompletely fill the through-holes H, as illustrated in FIG. 4C. In theseembodiments, the formation of the filling insulation patterns 130 may beomitted.

First device isolation patterns DI may be formed in the substrate 110.Each of, or at least one of, the first device isolation patterns DI maybe or may include a deep device isolation pattern that extends from thefirst surface 110 a to the second surface 110 b of the substrate 110.

Each of, or at least one of, the first device isolation patterns DI mayinclude an extension DI_E extending in the first direction D1. Theextensions DI_E may be between rows of the pixel regions PXR. One rowconsisting of the pixel regions PXR may be between the extensions DI_Eof a pair of the first device isolation patterns DI adjacent to oneanother. For example, the extensions DI_E and the rows of the pixelregions PXR may be alternately arranged in the second direction D2.

Each of, or at least one of, the first device isolation patterns DI mayfurther include protrusions DI_P that extend from the extension DI_E inparallel to the second direction D2. The protrusions DI_P may extendbetween the pixel regions PXR included in each of, or at least one of,adjacent rows.

Referring to FIGS. 3 and 6E, transfer gates TG′, source follower gates(not shown), reset gates (not shown), and selection gates (not shown)may be formed on the first surface 110 a of the substrate 110.

The formation of the transfer gates TG′ may include patterning the pixelregions PXR to form gate recess regions GR in the pixel regions PXR,respectively, forming a gate insulating layer (not shown) conformallycovering inner surfaces of the gate recess regions GR and the firstsurface 110 a of the substrate 110, forming a gate conductive layer (notshown) filling the gate recess regions GR, and patterning, for examplesequentially patterning, the gate conductive layer and the gateinsulating layer. The source follower gates, the reset gates, and theselection gates may also be formed by the process of patterning the gateconductive layer. Gate insulating patterns GI may be formed by theprocess of patterning the gate insulating layer. Next, gate spacers GSmay be formed on sidewalls of the transfer gates TG′ and sidewalls ofthe other gates.

A first floating diffusion region FD1 and a second floating diffusionregion FD2 may be formed in the well dopant region WR of each of, or atleast one of, the pixel regions PXR. The first and second floatingdiffusion regions FD1 and FD2 may be formed adjacent to the firstsurface 110 a of the substrate 110. The second floating diffusion regionFD2 may be formed at a side of a corresponding transfer gate TG′, andthe first floating diffusion region FD1 may be spaced apart from thesecond floating diffusion region FD2. The first and second floatingdiffusion regions FD1 and FD2 may be formed by injecting dopants of thesecond conductivity type into the well dopant regions WR. Source/drainregions adjacent to the source follower gates, the reset gates, and theselection gates may also be formed by the process of injecting thedopants of the second conductivity type.

Referring to FIGS. 3 and 6F, a first interlayer insulating layer 140 maybe formed to cover the first surface 110 a of the substrate 110. Thefirst interlayer insulating layer 140 may cover the gates (e.g., thetransfer gates TG′) formed on the first surface 110 a of the substrate110.

First bottom contact plugs BCP1 may be formed to penetrate the firstinterlayer insulating layer 140 and the filling insulation patterns 130.The first bottom contact plugs BCP1 may be connected to thethrough-electrodes 120, respectively. A width BCP1_W of each of, or atleast one of, the first bottom contact plugs BCP1 may be smaller than awidth 120_W of each of, or at least one of, the through-electrodes 120when viewed in a cross-sectional view. The formation of the first bottomcontact plugs BCP1 may include forming first bottom contact holes whichpenetrate the first interlayer insulating layer 140 and the fillinginsulation patterns 130 to expose the through-electrodes 120, forming aconductive layer (not shown) filling the first bottom contact holes, andperforming a planarization process on the conductive layer until thefirst interlayer insulating layer 140 is exposed. The forming theconductive layer may include depositing a conductive material, such as ametal including tungsten, in the first bottom contact holes. Thedepositing of the metal may include deposition with a chemical vapordeposition (CVD) process; however, inventive concepts are not limitedthereto.

Second bottom contact plugs BCP2 and third bottom contact plugs BCP3 maybe formed to penetrate the first interlayer insulating layer 140. Thesecond bottom contact plugs BCP2 may be connected to the first floatingdiffusion regions FD1, respectively, and the third bottom contact plugsBCP3 may be connected to the second floating diffusion regions FD2,respectively. The formation of the second and third bottom contact plugsBCP2 and BCP3 may include forming second and third bottom contact holespenetrating the first interlayer insulating layer 140 to expose thefirst and second floating diffusion regions FD1 and FD2, forming aconductive layer (not shown) filling the second and third bottom contactholes, and performing a planarization process on the conductive layeruntil the first interlayer insulating layer 140 is exposed.

The first to third bottom contact plugs BCP1, BCP2, and BCP3 may includea conductive material. For example, the first to third bottom contactplugs BCP1, BCP2, and BCP3 may include a metal (e.g., tungsten).

Lengths of the first bottom contact plugs BCP1 in the third direction D3may be greater than lengths of the second bottom contact plugs BCP2 inthe third direction D3 and lengths of the third bottom contact plugsBCP3 in the third direction D3.

In some embodiments, the first bottom contact plugs BCP1 may be formedby an additional process different from the process of forming thesecond and third bottom contact plugs BCP2 and BCP3. This may be becausethe lengths of the first bottom contact plugs BCP1 in the thirddirection D3 are greater than the lengths of the second bottom contactplugs BCP2 in the third direction D3 and the lengths of the third bottomcontact plugs BCP3 in the third direction D3. However, embodiments ofinventive concepts are not limited thereto. In some embodiments, thefirst bottom contact plugs BCP1 may be formed simultaneously with thesecond and third bottom contact plugs BCP2 and BCP3.

Referring to FIGS. 3 and 6G, interconnection lines CL1 and CL2 may beformed on the first interlayer insulating layer 140. The interconnectionlines CL1 and CL2 may include first interconnection lines CL1 and secondinterconnection lines CL2. Each of, or at least one of, the firstinterconnection lines CL1 may connect a corresponding one of the firstbottom contact plugs BCP1 to a corresponding one of the second bottomcontact plugs BCP2, and each of, or at least one of, the secondinterconnection lines CL2 may be connected to a corresponding one of thethird bottom contact plugs BCP3.

A second interlayer insulating layer 142 covering the interconnectionlines CL1 and CL2 may be formed on the first interlayer insulating layer140.

Referring to FIGS. 3 and 6H, a planarization process may be performed onthe second surface 110 b of the substrate 110. The planarization processmay be performed until one end 120 b of each of, or at least one of, thethrough-electrodes 120 is exposed. By the planarization process, thesacrificial substrate 100 may be removed and the second surface 110 b ofthe substrate 110 may be exposed. Thus, the ends 120 b of thethrough-electrodes 120 may be substantially coplanar with the secondsurface 110 b of the substrate 110. The planarization process may beperformed using a chemical mechanical polishing (CMP) process.

A buffer layer BL and an insulating layer 225 may be formed, for examplesequentially formed, on the second surface 110 b of the substrate 110.The buffer layer BL may include, for example, aluminum oxide and/orhafnium oxide. For example, the insulating layer 225 may include atleast one of silicon oxide, silicon nitride, or silicon oxynitride.

Referring to FIGS. 3 and 6I, top contact plugs TCP may be formed topenetrate the insulating layer 225 and the buffer layer BL. The topcontact plugs TCP may be connected to the through-electrodes 120,respectively. A width TCP_W of each of, or at least one of, the topcontact plugs TCP may be smaller than the width 120_W of each of, or atleast one of, the through-electrodes 120 when viewed in across-sectional view. The formation of the top contact plugs TCP mayinclude forming top contact holes which penetrate the insulating layer225 and the buffer layer BL to expose the through-electrodes 120,forming a conductive layer (not shown) filling the top contact holes,and performing a planarization process on the conductive layer until theinsulating layer 225 is exposed. For example, the top contact plugs TCPmay include a metal (e.g., tungsten). The depositing of the conductivelayer may include deposition with a chemical vapor deposition (CVD)process; however, inventive concepts are not limited thereto.

Referring to FIGS. 3 and 6J, color filters 212 and 214 may be formed tobe buried in an insulating structure 220.

In more detail, the insulating layer 225 may be patterned to form afirst insulating pattern 222 having recess regions 222 r. The recessregions 222 r of the first insulating pattern 222 may correspond to thepixel regions PXR of the substrate 110, respectively, when viewed in aplan view. The buffer layer BL may be exposed by the recess regions 222r.

The color filters 212 and 214 may be formed in the recess regions 222 r,respectively. One of the first color filter 212 and the second colorfilter 214 may be formed in each of, or at least one of, the recessregions 222 r. First color filters 212 may be formed to respectivelycorrespond to the first photoelectric conversion regions PD1 in a planview, and second color filters 214 may be formed to respectivelycorrespond to the second photoelectric conversion regions PD2 in a planview.

Second insulating patterns 224 may be formed on the color filters 212and 214. The first insulating pattern 222 and the second insulatingpatterns 224 may be defined as the insulating structure 220. Thus, thecolor filters 212 and 214 may be buried in the insulating structure 220.

Referring to FIGS. 3 and 6K, bottom electrodes 230 may be formed on theinsulating structure 220. The bottom electrodes 230 may be formed tocorrespond to the pixel regions PXR of the substrate 110, respectively,when viewed in a plan view. Each of, or at least one of, the bottomelectrodes 230 may be connected to a corresponding one of the topcontact plugs TCP. The formation of the bottom electrodes 230 mayinclude forming a preliminary bottom electrode layer (not shown) on theinsulating structure 220 and patterning the preliminary bottom electrodelayer.

A third insulating pattern 226 may be formed to fill a gap between thebottom electrodes 230. The formation of the third insulating pattern 226may include forming an insulating layer (not shown) filling the gapbetween the bottom electrodes 230 and performing a planarization processon the insulating layer until the bottom electrodes 230 are exposed.

Referring again to FIGS. 3 and 4A, the photoelectric conversion layerPD3, the top electrode 240, the capping layer 250, and the micro lenses260 may be formed, for example sequentially formed, on the bottomelectrodes 230.

According to some embodiments of inventive concepts, each of, or atleast one of, the pixels of the image sensor may absorb two kinds oflights to generate two kinds of photoelectric signals.

According to some embodiments of inventive concepts, the top contactplugs may have relatively small widths. Thus, it is possible to secure asufficient space, in which the color filters are buried, in theinsulating structure.

As a result, according to some embodiments of inventive concepts, theintegration density of the image sensor may be improved.

What is claimed is:
 1. An image sensor comprising: a substrate having afirst surface and a second surface opposite to the first surface; afirst floating diffusion region in the substrate, the first floatingdiffusion region adjacent to the first surface; a through-electrode inthe substrate, the through-electrode electrically connected to the firstfloating diffusion region; a through insulating pattern interposedbetween the through-electrode and the substrate; a filling insulationpattern between the through-electrode and the first surface; aninsulating structure, a bottom electrode on a top surface of theinsulating structure, a photoelectric conversion layer, and a topelectrode sequentially stacked on the second surface; a color filterburied in the insulating structure; and a top contact plug penetratingthe insulating structure, the top contact plug connecting the bottomelectrode to the through-electrode and tapering from a first point ofcontact on the bottom electrode to a second point of contact on thethrough-electrode, wherein the through-electrode includes dopedpoly-silicon, and wherein a sidewall of the through insulating patternis aligned with a sidewall of the filling insulation pattern.
 2. Theimage sensor of claim 1, wherein a width of the top contact plugprogressively decrease from a top surface of the top contact plug to thesecond surface.
 3. The image sensor of claim 1, wherein the insulatingstructure comprises: a first insulating pattern having a recess region,the recess region including the color filter; and a second insulatingpattern on the color filter.
 4. The image sensor of claim 1, wherein oneend of the through-electrode is substantially coplanar with the secondsurface.
 5. The image sensor of claim 4, wherein a distance between theone end and another end of the through-electrode is less than a distancebetween the second surface and the first surface.
 6. The image sensor ofclaim 1, further comprising: an interlayer insulating layer on the firstsurface; and a first bottom contact plug penetrating the interlayerinsulating layer and the filling insulation pattern, the first bottomcontact plug connected to the through-electrode.
 7. The image sensor ofclaim 1, wherein the filling insulation pattern has a bottom surfacecoplanar with the first surface.
 8. The image sensor of claim 6, furthercomprising: a second bottom contact plug penetrating the interlayerinsulating layer so as to be connected to the first floating diffusionregion; and an interconnection line on the interlayer insulating layer,the interconnection line electrically connecting the first bottomcontact plug to the second bottom contact plug.
 9. The image sensor ofclaim 8, wherein a vertical length of the first bottom contact plug isgreater than a vertical length of the second bottom contact plug. 10.The image sensor of claim 1, further comprising: a well dopant region inthe substrate, the well dopant region adjacent to the first surface, thewell dopant region having a first conductivity type; a photoelectricconversion region in the substrate and between the second surface andthe well dopant region, the photoelectric conversion region having asecond conductivity type different from the first conductivity type; anda second floating diffusion region in the well dopant region, the secondfloating diffusion region having the second conductivity type.
 11. Animage sensor comprising: a substrate having a first surface and a secondsurface opposite the first surface, the substrate including pixelregions disposed along a first direction; first and second deep deviceisolation patterns in the substrate, the first and second deep deviceisolation patterns extending from a first surface of the substrate to asecond surface of the substrate; through-electrodes in the substrate,the through-electrodes between the pixel regions when viewed in a planview; an insulating structure, a photoelectric conversion layer, and atop electrode sequentially provided on the second surface; bottomelectrodes between the insulating structure and the photoelectricconversion layer; top contact plugs in the insulating structure toconnect the bottom electrodes to the through-electrodes, respectively,at least one of the top contact plugs tapering from a first point ofcontact with the bottom electrodes to a second point of contact with thethrough-electrodes; and color filters buried in the insulatingstructure, wherein the through-electrodes include dopants, wherein thefirst deep device isolation pattern includes a first extension extendingin the first direction and first protrusions extending between the pixelregions from the first extension, wherein the second deep deviceisolation pattern includes a second extension extending in the firstdirection and second protrusions extending between the pixel regionsfrom the second extension to be adjacent to the first protrusions,respectively, and wherein one of the through-electrodes is between oneof the first protrusions and one of the second protrusions and spacedapart from the first protrusions and the second protrusions.
 12. Theimage sensor of claim 11, further comprising: through insulatingpatterns interposed between the through-electrodes and the substrate,wherein the through insulating patterns are spaced apart from the firstprotrusions and the second protrusions between the first protrusions andthe second protrusions, respectively.
 13. The image sensor of claim 11,wherein widths of the through-electrodes in the first direction aregreater than widths of the first protrusions in the first direction andwidths of the second protrusions in the first direction.
 14. The imagesensor of claim 12, further comprising: filling insulation patternsbetween the through-electrodes and the first surface, respectively,wherein a sidewall of one of the through insulating patterns is alignedwith a sidewall of one of the filling insulating patterns.
 15. The imagesensor of claim 14, wherein the filling insulation patterns have bottomsurfaces coplanar with the first surface.
 16. The image sensor of claim11, further comprising: first floating diffusion regions provided in thepixel regions, respectively, the first floating diffusion regionsadjacent to the first surface, wherein the through-electrodes areelectrically connected to the first floating diffusion regions,respectively.
 17. A CMOS image sensor comprising: a substrate includinga first surface and a second surface opposite the first surface; atransfer gate on the first surface of the substrate; a micro lens on thesecond surface of the substrate; a through-electrode in the substrate,the through-electrode extending from the first surface of the substrateto the second surface of the substrate, the through-electrode includingdoped poly-silicon; a through insulating pattern interposed between thethrough-electrode and the substrate; an interlayer insulating layer onthe first surface; a filling insulation pattern between thethrough-electrode and the interlayer insulating layer; a first bottomcontact plug on the first surface of the substrate, the first bottomcontact plug penetrating the filling insulation pattern to be in contactwith a first surface of the through-electrode; a top contact plug on thesecond surface of the substrate, the top contact plug being in contactwith a second surface of the through-electrode and a bottom electrode,the top contact plug tapering from a first point of contact with thebottom electrode to a second point of contact with thethrough-electrode; and an insulating layer on the second surface of thesubstrate, wherein wherein the bottom electrode is on the insulatinglayer, and wherein a sidewall of the through insulating pattern isaligned with a sidewall of the filling insulation pattern.
 18. The CMOSimage sensor of claim 17, further comprising: a photoelectric conversionlayer, and a top electrode sequentially stacked on the second surface ofthe substrate, wherein the top contact plug connects the bottomelectrode to the through-electrode.
 19. The CMOS image sensor of claim17, further comprising: a first floating diffusion region in thesubstrate, the first floating diffusion region adjacent to the firstsurface of the substrate; a second bottom contact plug being in contactwith the first floating diffusion region; and an interconnection lineelectrically connecting the first bottom contact plug to the secondbottom contact plug.
 20. The image sensor of claim 1, wherein a top ofthe color filter is below a top of the top contact plug.